22nd International Conference & Exhibition
30th May – 3rd June 2022, Geneva, Switzerland

09:50 – 10:20

Chair: Byron Knapp

12:30 – 12:34     Ametek
12:34 – 12:38     Moore Nanotech
12:38 – 12:42     ASML
12:42 – 12:46     Cranfield Precision
12:46 – 12:50     Prof. Instruments
12:50 – 12:54     JPE
12:54 – 12:58     SIOS
12:58 – 13:02     Micro Lam

Co-Chair: Anke Günther; Saša Zelenika

Session Keynote:
14:00     Rectilinear translation four-bar flexure mechanism based on four Remote Center Compliance pivots
Loïc Tissot-Daguette, EPFL, CH

14:20     Alleviating stress concentrations by constant curvature flexure mechanisms
Jan de Jong, University of Twente, NL

14:35     Nanotribological characterization of an X39CrMo17-1 steel thin-film via measurement-based machine learning methods
Marko Percic, University of Rijeka, HR

14:50     An enhanced mechanism for a kibble balance at the National Institute of Standards and Technology
Lorenz Keck, NIST. US

15:05      Discussion

Chair: Byron Knapp

15:25 – 15:29     IBS Precision
15:29 – 15:33     MI-Partners
15:33 – 15:37     Aerotech
15:37 – 15:41     Hexagon

Chair: Byron Knapp

16:10 – 16:14     attocube
16:14 – 16:18     Contour Fine Tooling
16:18 – 16:22     SYMETRIE
16:22 – 16:26     Kern Microtechnik
16:26 – 16:30     Loxham Precision
16:30 – 16:34     Smaract GmbH

08:30 – 09:00

Co-Chair: Theo Ruijl; Dominiek Reynaerts

Session Keynote:
09:00     A hydrogen valve enabling overlay and throughput for EUV
Radu Donose, ASML, NL       

09:20     Material removal rate prediction with force signals and machine learning in magnetically driven internal finishing
Jiong Zhang, National University of Singapore, SG

09:35     The MIIM method for the environmental thermal error study of large machine tools: A real case study
Fernando Egaña, TEKNIKER, ES

09:50     On-machine measurement cycle for the adaptive thermal error compensation of linear axes
Nico Zimmermann, ETH Zürich, CH

10:05     Active load cell with positive, negative and zero stiffness operating modes for micronewton range contact force monitoring in electrical probing
Michal Smreczak, EPFL, CH

10:20      Discussion

Co-Chair: Liam Blunt; Jelm Franse

Session Keynote:
11:15     Process behaviour of segmented and actuated tool electrodes for variable shaping in sinking EDM
Jonas Ludwig, IWF TU Berlin, DE

11:35     A novel design of soft tool manipulator for hard-to-reach zone machining by microEDM
Sam Peerlinck, KU Leuven, BE   

11:50     Surface optimization of dental implants with laser surface texturing and silver coating
Luiz Schweitzer, Fraunhofer IPK, DE    

12:05    An investigation of maskless fluid jet polishing of three dimensional structured surfaces
Chunjin Wang, The Hong Kong Polytechnic University, HK

12:20     Fabrication of an atomically smooth polycrystalline surface without grain boundary steps using catalyst-referred etching
Daisetsu Toh, Osaka University, JP

12:35     Discussion

14:00 – 15:25

Co-Chair: Jose Yague-Fabra; Henny Spaan

Session Keynote:
14:00     Structured laser beam for alignment and large-scale metrology
Krystof Polak, CERN, CH

14:20     Frequency scanning interferometry for accurate robot position measurement
Mohammed Isa, University of Nottingham, UK

14:35     Geometrical measurement concept for the ATLAS New Small Wheel construction
Dirk Mergelkuhl, CERN, CH 

14:50     Simulation and accuracy evaluation of a new 3D photogrammetric position measurement system
Uwe Bielke, Glasgow Caledonian University, DE

15:05     Discussion

Chair: Byron Knapp

15:25 – 15:29     Zygo
15:29 – 15:33     Evident Europe (Olympus)
15:33 – 15:37     Prior Scientific
15:37 – 15:41     Huber
15:41 – 15:45     Hittech Group

Co-Chair: Harald Bosse;  Thomas Ittner

Session Keynote:
09:00     Development of a high precision balance for measuring quantity of dispensed fluid as a new calibration reference for the becquerel
Sven Schulze, NIST, US

09:20     Near-field spectroscopic measurement of thermally excited evanescent waves
Ryoko Sakuma, The University of Tokyo, JP

09:35     Efficient close-range photogrammetry reconstruction through autonomous image background removal
Joe Eastwood, University of Nottingham, UK

09:50     A new spin on kibble: A self calibrating torque realization device at NIST
Zane Comden, NIST, US

10:05     A plate beamsplitter based stereo phase measuring deflectometry for measuring specular structured surfaces
Feng Gao, University of Huddersfield, UK

10:20     Discussion

Co-Chair: Oltmann Riemer;  Harkaitz Urreta

Session Keynote:
13:45     Micro milling of brass and commercially pure titanium with all-ceramic micro end mills made from four different ceramic tool substrates
Tobias Mayer, TU Kaiserslautern – Institute for Manufacturing Technology and Production Systems, DE

14:05     Precision cutting of CVD-SiC aspheric mold by PCD milling tool
Mirai Sakaida, Chubu University, JP

14:20     Cutting of tungsten carbide using driven rotary tool
Dennis Wee Keong Neo, Singapore Institute of Manufacturing Technology, SG

14:35     Ductile cutting regime in freeform milling of single crystal silicon
Marvin Groeb, Kern Microtechnik GmbH, DE

15:15     Enhanced ultra-precision machining of discontinuous microstructures on monolithic surfaces
Timo Dörgeloh, Leibniz Institute for Materials Engineering IWT, DE

15:30     Research on CNC polishing technology of rotational symmetric aspheric optical elements
Yaolong Chen, Xi’an Jiaotong University, CN

15:45     Discussion