Measuring capability of a confocal sensor integrated in a two-stage long-range nanopositioning platform
Measuring instrument;Nano technology
Capability verification of the measurement with a large-range nanopositioning stage
Measurement,Metrology,Nano technology
Integration of a piezostage and a measuring instrument in a two-stage long-range nanopositioning platform
Geometric modelling,Metrology,Nano technology
Design of a reference standard for Xray CT and other contact and non-contact metrological instruments
Calibration,Metrology,Microstructure
Positioning uncertainty assessment of a large-range nanopositioning platform
Positioning,Thermal error,Uncertainty
Performance study of Z-direction dynamics of a XY nanopositioning stage
Nano technology,Positioning,Sensor