Effects of laser parameters on surface morphology and phase composition in 4H-SiC laser surface modification
Laser;Parameter
Inspection;Measuring instrument;Metrology;Optical
Neural network;Predictive;Roughness;Ultra-precision
Micromachining;Selective laser melting (SLM);Titanium;Ultra-precision
Cutting;Damage;Residual stress;Ultra-precision
Ceramic;Electrical discharge machining (EDM);Electrode;Machining
Cutting,Damage,Image,Surface
Abrasion,Finishing,Machining,Polishing
Abrasion,Finishing,Polishing,Ultra-precision
Abrasion,Finishing,Polishing,Ultra-precision