On the development of five-axes nanopositioning machines for measurement and fabrication purposes based on Cartesian systems
Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Ultra-precision
Corner loading and its influence on the tilt sensitivity of precision weighing cells
Error,Finite element method (FEM),Measuring instrument,Mechanism
Investigations on kinematic couplings for tool-changing interfaces in highest-precision devices
Kinematic,Measurement,Tool,Ultra-precision
Conceptional design of a positioning device with subatomic resolution and reproducibility
Linear,Mechanism,Metrology,Silicon
Wireless actuation within hermetically enclosed precision systems
Actuator,Positioning,Precision,Vacuum
Mechanical properties of an adjustable weighing cell prototype
Mechanism,Mechatronic,Resolution,Stiffness
Measuring setup for the investigation of the reproducibility of tool changing interfaces for high-precision devices
Kinematic,Measurement,Nano manufacturing,Tool
Investigations of different compliant manipulator concepts for a high-precise rotational motion
Accuracy,Design method,Mechanism,Strain
On precise modelling of very thin flexure hinges
Experimentation,Finite element method (FEM),Modelling,Stiffness