Stabilization and optimization of dynamic property for sub-nanometre resolution on ultraprecision positioning mechanism driven by preloaded ball screw
Control,Optimisation,Positioning,Ultra-precision
Control,Optimisation,Positioning,Ultra-precision
Mechanism,Positioning,Topography,Ultra-precision
Control,Positioning,Turning,Ultra-precision
Mechanism,Positioning,Ultra-precision,Vibration
Control,Friction,Hydrostatic,Mechanism