Microprobes for high-speed roughness measurements


Thermal Design and Dimensional Drift

Demands for nanoradian angle metrology and performance requirements on autocollimators

Concept of metrological reference surfaces for asphere and freeform metrology

In-situ characterisation of nanomechanical measurement instruments using a force transfer standard with interferometric readout

Calibration of circular apertures using an optical CMM

The EMRP Project “Thermal design and dimensional drift”

Topographical profiler investigations on a sphere

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