Physikalisch-Technische Bundesanstalt (PTB)

|Physikalisch-Technische Bundesanstalt (PTB)

A High-resolution, Self-sensing and Self-actuated Probe for Micro and Nano Coordinate Metrology and Scanning Force Microscopy

Characteristics of the new Deflectometric Flatness Reference at PTB

Further Improvements of the Measurement Capability of a Metrological Large Range AFM

Improved Manufacturing Chain for Silicon Spheres

Relations between different definitions of optical resolution

In-situ characterisation of the probing force of contact stylus profilers using a micromachined nanoforce actuator

Evaluation of periodic nonlinearities of optical interferometers by comparing two interferometers with different wavelength

Direct numerical simulation of rough microcontacts under normal load

Investigation of a mini clamping system for micro manufacturing

A micro-scanning probe microscope-head with integrated interferometric fiber optic displacement sensor

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