Development of a Micro-SPM Head Array with Exchangeable Cantilevers euspen2018-04-04T14:01:43+00:00 Read More
A High-resolution, Self-sensing and Self-actuated Probe for Micro and Nano Coordinate Metrology and Scanning Force Microscopy euspen2018-04-04T14:01:54+00:00 Read More
Characteristics of the new Deflectometric Flatness Reference at PTB euspen2018-04-04T14:01:58+00:00 Read More
Further Improvements of the Measurement Capability of a Metrological Large Range AFM euspen2018-04-04T14:02:06+00:00 Read More
Relations between different definitions of optical resolution euspen2018-04-04T14:04:57+00:00 Read More
In-situ characterisation of the probing force of contact stylus profilers using a micromachined nanoforce actuator euspen2018-04-04T14:05:02+00:00 Read More
Evaluation of periodic nonlinearities of optical interferometers by comparing two interferometers with different wavelength euspen2018-04-04T14:05:02+00:00 Read More
Direct numerical simulation of rough microcontacts under normal load euspen2018-04-04T14:05:05+00:00 Read More
Investigation of a mini clamping system for micro manufacturing euspen2018-04-04T14:05:09+00:00 Read More
