Uploaded: 4th June 2012
AuthorSai GaoAuthor, Thomas AhbeAuthor, Uwe BrandAuthor, Zhi Li Download FileIn-situ characterisation of the probing force of contact stylus profilers using a micromachined nanoforce actuator
Home|In-situ characterisation of the probing force of contact stylus profilers using a micromachined nanoforce actuator