Measurement concept for the correction of beam misalignment of a Pseudo-Abbe comparator for diameter and form calibrations
Dimensional,Interferometry,Measuring instrument,Metrology
A new sensor for one-dimensional tactile measurements with the Nanometer Comparator
Coordinate measuring machine (CMM),Dimensional,Interferometry,Measuring instrument
A new vacuum setup for fundamental investigations on interferometric length measurements
Dimensional,Interferometry,Laser,Optical