Physik Instrumente (PI) GmbH & Co. KG

|Physik Instrumente (PI) GmbH & Co. KG

Magnetically levitated planar motion stage with atomic resolution for metrological high-speed scanning probe microscopy

Magnetic bearing,Metrology,Positioning,Scanning probe microscope (SPM)

Air bearing hexapod for motion and positioning in six degrees of freedom with sub-micrometer precision


Ultra-flat, high-speed planar stage based on parallel kinematics


High-Precision Parallel Kinematic Tip/Tilt Mirror with huge Motion Range


A novel drive and control method for piezoelectric motors in microscopy stages

Actuator,Adaptive control,Piezo-electric,Positioning

Development of a powertrain for hexapods for ultra-high vacuum environment


Hexapods and other high precision parallel kinematics in (industrial automation and) Silicon Photonics

Development of High-Precision Parallel Kinematics for Industrial Automation and Silicon Photonics


Adjustable counter weight balance for actuators


Hybrid voice coil actuator with novel high-precision force control device based on incremental sensors

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