A compact cube-shaped parallel kinematic machine for dynamic and high-precision positioning in six degrees of freedom
Dynamic;Hexapod;Positioning
Automation;Hexapod;Positioning;Precision
Magnetic bearing,Metrology,Positioning,Scanning probe microscope (SPM)
Dynamic,Hexapod,Positioning,Precision
Accuracy,Kinematic,Speed
Kinematic,Parallel,Precision
Actuator,Adaptive control,Piezo-electric,Positioning
Actuator,Design,Hexapod,Vacuum
Hexapod,Parallel,Photonics,Robot