Magnetically levitated planar motion stage with atomic resolution for metrological high-speed scanning probe microscopy
Magnetic bearing,Metrology,Positioning,Scanning probe microscope (SPM)
Air bearing hexapod for motion and positioning in six degrees of freedom with sub-micrometer precision
Dynamic,Hexapod,Positioning,Precision
Ultra-flat, high-speed planar stage based on parallel kinematics
Accuracy,Kinematic,Speed
High-Precision Parallel Kinematic Tip/Tilt Mirror with huge Motion Range
Kinematic,Parallel,Precision
A novel drive and control method for piezoelectric motors in microscopy stages
Actuator,Adaptive control,Piezo-electric,Positioning
Development of a powertrain for hexapods for ultra-high vacuum environment
Actuator,Design,Hexapod,Vacuum
Development of High-Precision Parallel Kinematics for Industrial Automation and Silicon Photonics
Hexapod,Parallel,Photonics,Robot
Adjustable counter weight balance for actuators
Actuator,Force,Mechanism