Nagoya University

Irradiation characteristics of unidirectional magnetic field-applied fast atom beam source for surface-activated bonding

Bonding,Etching,Vacuum,Wafer

Clare Nisbet2023-11-16T13:03:14+00:00

Development and evaluataion of the novel FAB gun

Abrasion,Bonding,Nano manufacturing,Surface

David Billington2019-06-14T13:45:56+00:00

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