Uploaded: 29th November 2023
AuthorKyosuke Oshima, Wataru NOMURA, Taisei Kato, Chiemi OKA, Junpei SAKURAI, Seiichi HATABonding,Etching,Vacuum,Wafer
Download FileIrradiation characteristics of unidirectional magnetic field-applied fast atom beam source for surface-activated bonding
Home|Irradiation characteristics of unidirectional magnetic field-applied fast atom beam source for surface-activated bonding