Korea Institute of Machinery & Materials

|Korea Institute of Machinery & Materials

Thermal Stability and Geometric Error Assessment of A Hydrostatic Bearing Guided Machine

Estimation of 5 DOF Motion Errors in Linear Motion Bearing Stage

Ultraprecision Control of A Hydrostatic Bearing Guided Machine with Position Stability Analysis

Prediction of 5-DOF Motion Errors of Hydrostatic Bearing Tables and Its Experimental Verification

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