Iterative learning control for nano-positioning stage of defect imaging equipment
Control;Performance;Positioning;Ultra-precision
Control;Performance;Positioning;Ultra-precision
Algorithm;Bearing;Edge;Spindle
Modelling,Spindle,Stability,Structural analysis
Acoustic,Cooling,Finite element method (FEM),Ultrasonic
Cutting,Grooving,Mechanical,Ultra-precision
Design method,Dynamic,Optimisation,Stiffness
3D printing,Laser beam machining (LBM),Manufacturing,Metal