Nanometrology and nanofabrication using a tip-based system combined with a planar nanopositioning machine (NFM-100)
Atomic force microscopy (AFM),Nano manufacturing,Positioning
Institute of Process Measurement and Sensor Technology, Faculty of Mechanical Engineering Technische Universität Ilmenau
Home|Institute of Process Measurement and Sensor Technology, Faculty of Mechanical Engineering Technische Universität Ilmenau