Three-beam constant-force flexure-based translation stage
Flexibility;Force;Mechanism;Nonlinear
Flexibility;Force;Mechanism;Nonlinear
Accuracy;Electrical discharge machining (EDM);Experimentation;Mechanism
Design;Mechanism;Modelling;Nonlinear
Conceptual design,Finite element method (FEM),Mechanism,Straightness
Mechanism,Modelling,Stiffness,Wire EDM
Gear,Measuring instrument,Precision,Sensor
Measurement,Measuring instrument,Mechanical,Silicon
Kinematic,Measuring instrument,Precision,Rolling