Using deformable surface for thin substrate transport and positioning system: Initial design and preliminary results euspen2018-04-04T13:59:52+00:00 Read More
Constant Force Micro Mechanism out of Carbon Nanotube Forest euspen2018-04-04T14:04:08+00:00 Read More
Experimental validation of design parameters of a non-contact thermally actuated deformable mirror euspen2018-04-04T14:04:32+00:00 Read More
Experimental validation of a piezoelectrically driven photomask curvature manipulator euspen2018-04-04T14:04:32+00:00 Read More
A novel constant force compliant precision stage to balance a load in six degrees of freedom euspen2018-04-04T14:04:38+00:00 Read More
Optimal Performance of a Controlled System with Structural Parameter Variation euspen2018-04-04T14:04:51+00:00 Read More
