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Delft University of Technology
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Delft University of Technology
Using deformable surface for thin substrate transport and positioning system: Initial design and preliminary results
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euspen
2018-04-04T13:59:52+00:00
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Linear nano-positioning stage using ferrofluid bearings
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euspen
2018-04-04T14:00:10+00:00
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Estimating deformation of a free-floating wafer chuck
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euspen
2018-04-04T14:00:31+00:00
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Experimental validation of a piezoelectrically driven photomask curvature manipulator
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euspen
2018-04-04T14:04:32+00:00
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A novel constant force compliant precision stage to balance a load in six degrees of freedom
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euspen
2018-04-04T14:04:38+00:00
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Optimal Performance of a Controlled System with Structural Parameter Variation
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euspen
2018-04-04T14:04:51+00:00
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Deformation measurement of a plate with damping contact
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euspen
2018-04-04T14:05:06+00:00
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Reduction of transient thermal deformation in a thin plate under moving heat load using thermal modal analysis based control methods
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euspen
2018-04-04T14:05:08+00:00
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Energy efficient MEMS Using Collinear-Type Statically Balanced Compliant Micro Mechanisms (SB-CMM): Experimental Results
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euspen
2018-04-04T14:05:26+00:00
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Air Film Based Contactless Planar Positioning System with Sub-micron Precision
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euspen
2018-04-04T14:06:05+00:00
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