Modelling and Control of Tunable Magnet Actuators
Actuator;Design method;Mechatronic;Modelling
Actuator;Design method;Mechatronic;Modelling
Actuator;Handling;Vacuum;Wafer
Control;Mechatronic;Nonlinear;Precision
Control;Damping;Piezo-electric;Vibration
Composite;Design method;Optical;Optimisation
Control,Dynamic,Motion,Optimisation
Actuator,Mechatronic
Control,Dynamic,Motion,Optimisation