Mu- Investigation on SurfaceSubsurface Damage Mechanism in Yttrium Aluminum Garnet Crystal Lapping and Polishing
Accuracy,Anisotropy,Nano indentation,Polishing
Double-sided lapping of thin copper substrate by textured fixed-abrasive pad
Flatness,Lapping,Residual stress,Texture
Study on High Precision Measurement of Chemical Mechanical Polishing Removal Rate of YAG Crystal
Accuracy,Lapping,Measurement,Ultra-precision