Carl Zeiss SMT GmbH

|Carl Zeiss SMT GmbH

Guaranteeing nanometre positioning under manufacturing and modelling uncertainty


Multivariable stability analysis of position-controlled payloads with flexible eigenmodes


Multivariable performance analysis of position-controlled payloads with flexible eigenmodes


Mechanical Shortcut Localization for Active Vibration Isolation Systems

Assembly,Diagnostics,Quality assurance,Vibration

Aliasing of Resonances in discrete-time controlled mechatronic Systems – Phenomenon, Modelling and Mitigation

Considering Aliasing of Resonances in the Design of discrete-time controlled Mechatronic Systems


Optimising mirror manipulator performance by means of robustness analysis of dynamics and control

Electromagnetic Dampers in Precision Machines

Heat transfer strategies for temperature sensitive components in vacuum environments

Precision Flexure Hinges for High-Performance Optics

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