Measurement-based loop shaping approach of feedback control for high performance direct drives incorporating friction behaviour of guides
Bearing,Control,Friction,Stiffness
Practical method for checking of self-locking in kinematic couplings with linear equations
Design,Design method,Friction,Kinematic
Thermo-mechanical system modelling of a lithography high precision optics
Artificial intelligence,Compensation,Thermal error,Turning
Guaranteeing nanometre positioning under manufacturing and modelling uncertainty
Control,Optimisation,Parameter,Uncertainty
Multivariable stability analysis of position-controlled payloads with flexible eigenmodes
Analysis,Control,Stability,Ultra-precision
Multivariable performance analysis of position-controlled payloads with flexible eigenmodes
Analysis,Control,Feedback,Performance
Mechanical Shortcut Localization for Active Vibration Isolation Systems
Assembly,Diagnostics,Quality assurance,Vibration