Carl Zeiss SMT GmbH

|Carl Zeiss SMT GmbH

Measurement-based loop shaping approach of feedback control for high performance direct drives incorporating friction behaviour of guides

Bearing,Control,Friction,Stiffness

Measurement-based loop shaping approach of feedback control for high performance direct drives incorporating friction behaviour of guides

Bearing,Control,Friction,Stiffness

Practical method for checking of self-locking in kinematic couplings with linear equations

Design,Design method,Friction,Kinematic

Measurement-based loop shaping approach of feedback control for high performance direct drives incorporating friction behaviour of guides

Control,Drive,Friction,Measurement

Thermo-mechanical system modelling of a lithography high precision optics

Artificial intelligence,Compensation,Thermal error,Turning

Guaranteeing nanometre positioning under manufacturing and modelling uncertainty

Control,Optimisation,Parameter,Uncertainty

Multivariable stability analysis of position-controlled payloads with flexible eigenmodes

Analysis,Control,Stability,Ultra-precision

Multivariable performance analysis of position-controlled payloads with flexible eigenmodes

Analysis,Control,Feedback,Performance

Mechanical Shortcut Localization for Active Vibration Isolation Systems

Assembly,Diagnostics,Quality assurance,Vibration

Aliasing of Resonances in discrete-time controlled mechatronic Systems – Phenomenon, Modelling and Mitigation

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