Structure and control of an inchworm for precise displacement
Actuator,Control,Piezo-electric,Positioning
Actuator,Control,Piezo-electric,Positioning
Actuator,Control,Mechatronic,Piezo-electric
Actuator,Evaluation,Mechatronic,Piezo-electric
Actuator,Control,Mechatronic,Vibration
Acoustic,Laser,Measurement,Miniaturization
Accuracy,Measurement,Positioning,Robot