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Aichi Institute of Technology
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Aichi Institute of Technology
A Six-degree-of-freedom Micro Parallel Kinematic Stage for Multi-axis Positioning
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euspen
2018-04-04T14:04:32+00:00
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An Inchworm-type Microactuator Using Levitation Mechanisms
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euspen
2018-04-04T14:05:56+00:00
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Micro-nano Position Control System Using Interferometric Phenomena
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euspen
2018-04-04T14:06:10+00:00
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The characteristics of an inchworm stage using piezoelectric actuators and electromagnets
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euspen
2018-04-04T14:07:27+00:00
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