Uploaded: 27th August 2025
AuthorDragan Kosti?, Luke Van Eijk, Mojtaba Haghi, Wout Laarakkers, Jasper Gerritsen, Thom Samuels, Kai Wa Yan, Guido Knippels, Gary WiddowsonAccuracy;Algorithm;Computer automated;Control
Download FileSimultaneous nonlinear feedback and linear feedforward control design for high-performance motion control of machines for semiconductor manufacturing
Home|Simultaneous nonlinear feedback and linear feedforward control design for high-performance motion control of machines for semiconductor manufacturing