Non-destructive roughness analysis of high aspect ratio rectangular grating sidewalls for nanostructured silicon wafer

Uploaded: 12th June 2020

Author: Dario Loaldi, Danilo Quagliotti, Matteo Calaon, Ilja Czolkos, Alicia Johansson, Theodor Nielsen, Jørgen Garnæs, Guido Tosello

Atomic force microscopy (AFM),Metrology,Nano technology,Wafer

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