This lecture provides a fast paced hands-on introduction to rapid precision machine design based on FUNdaMENTAL principles, including theory and best practices.

Topics include: design philosophy, principles of accuracy, repeatability and resolution, error budgeting, bearings, structures, and actuators.

Examples will be presented to show why understand FUNdaMENTAL principles is critically important for a designer to understand in order to be able to most effectively use modern design tools such as solid modeling and finite element analysis in the design of precision machines.

It starts with selected basics in geometrical and wave optics. Furthermore, relevant information about the processing of image-like data is given.

Because the scope of optical measurement principles is widely diversified, the content is focused on those techniques which are relevant for the solution of measurement tasks in surface feature measurement (shape, waviness, roughness, and isolated defects), experimental stress analysis, nondestructive testing and high resolution reconstruction of non-resolved features in nanometrology.

Principles for the solution of inverse/reconstruction/identification problems in optical metrology are presented. The tutorial ends with a discussion of current challenges for optical inspection principles and tries to give advice for their completion.

Over a period of more than 40 years Dutch companies as Philips Electronics, ASML, FEI, OCE and many others have developed a successful approach to the Design and Development of Mechatronic solutions for High Precision Motion. Starting with consumer products as Optical Disc Drives and leading to advanced solutions for nanometer positioning in combination with accelerations of more than 10g’s used in the Lithography tools, a continuous attention to development of new industrial technology delivered successful results.

Tutors

Dr. Dick Laro (1978) received the M.Sc. and Ph.D. degree in Mechanical Engineering from the Delft University of Technology in the period 1997-2007. During his Ph.D., he worked on the development of magnetically levitated positioning systems. From 2007-2008 he worked as mechatronic developer at Singulus Mastering. In 2009 he joined MI-Partners in Eindhoven, were he currently holds the position of Mechatronic Architect and is competence leader for the dynamics and control group. Here he has worked on the development of various mechatronic systems in the semiconductor industry. He has been involved in various international training activities.

Design for and construction in a specific vacuum? The ideal vacuum would be an empty vacuum. Unfortunately an empty vacuum does not exist. Moreover, any introduction of additional functionality introduces a source of gasses and contamination. Designers in the “normal atmospheric world” may use their acquired instinct and experience, but may fail under ultra-clean vacuum conditions. The main reason being that basic rules of vacuum completely differ from those at atmospheric or higher pressures.

After the tutorial the trainees have been acquainted with the basics of vacuum technique. Subsequently they will learn how to make a robust design, applicable for vacuum conditions.

The trainees will acquire a basic knowledge how to create, measure and maintain vacuum. Vacuum has properties unknown in our daily surroundings i.e. there is no standard reference with daily life for people not involved in vacuum technique. To develop the required level of perception and understanding basic theoretical knowledge about vacuum systems will be combined with exercises during the course.

Intended for
The course “introduction Design in Ultra High Vacuum” is meant for employees of BSc and higher level responsible for constructions in ultra-clean vacuum in any way. These employees could be in Research and Development, Engineering, Purchase, Management etc.