This tutorial will be focused on surface metrology including basic surface metrology and advances in surface metrology over recent decades, particularly innovations in optics metrology.

Topics include basic metrology and other specific topics like structured surface measurements, optics metrology, freeform surface characterisation and so on.

On basic surface metrology, it will introduce the fundamentals of surface metrology, including basic terminologies, surface finish measurements and some application examples.  This will help you to understand the importance of surface metrology by introducing the nature of surfaces with examples.  As well as reviewing the history of roughness measurement techniques, you will learn how to evaluate roughness using correct filters and pick up some concepts of the key roughness parameters.

For other specific topics, each covers basic concepts, applications, measurement techniques and measurement examples, to help you get an overview of current surface metrology. For example, for optics metrology, it will introduce the fundamentals of optics metrology, as well as presenting you the newest advanced metrology tools developed over the last decades, and show some interesting part measurement examples.

Intended Audience

This tutorial should be useful for those who want to gain the fundamentals of surface metrology and to understand its advances and extensions over the past decades. It suits different levels of people, including research students, researchers, and industrial technical staff.

This is a beginner to intermediate level course, with material ranging from basic to advanced, to provide both an overview and references for further studies.