Nano & Micro

|Nano & Micro

Measuring setup for compensation of shrinkage induced misalignments of adhesive bondings

Alignment,Bonding,Compensation

Optimal Design of Eddy Current Damper in Air Bearing Guided Motion System

Koopman-based model predictive control of a nanometric positioning system

Experimentation,Friction,Nonlinear,Positioning

Investigations of the geometrical scaling in the systematic synthesis of compliant mechanisms

Mechanism,Motion,Synthesis,Ultra-precision

An Approach to Cutting State Monitoring in End Milling of Hard and Brittle Materials

End milling,Glass,Micromachining,Monitoring

Ultra-precision Cutting Process Monitoring of Single Crystal Silicon by Radius Nosed Cutting Tool

Diamond,Silicon,Turning,Ultra-precision

Surface figure error correction by additive plasma jet machining and ion beam assisted mask transfer

Chemical vapor deposition (CVD),Ion beam machining (IBM),Optical,Ultra-precision

Experimental approach to establishing a model of nanoscale friction

Experimentation,Friction,Nonlinear,Scanning probe microscope (SPM)

The implementation of ultra precision rotations to multiaxial nanofabrication machines: challenges and solution concepts

Conceptual design,Coordinate measuring machine (CMM),Knowledge based system,Nano manufacturing

Investigation on the performance of an aerostatic spindle with consideration of fluid-structure-thermal interaction effect

Bearing,Modelling,Spindle,Stiffness

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