Calibration and correction of a 6 degree of freedom piezo driven stage euspen2018-04-04T14:07:46+00:00 Read More
Scanning strategies for long term and long distance AFM measurements euspen2018-04-04T14:07:46+00:00 Read More
Comparison of measurements from optical CMM and focus-variation microscope of a µPIM mechanical part euspen2018-04-04T14:07:46+00:00 Read More
Performance verification of focus variation and confocal microscopes measuring ultra-fine tilted surfaces euspen2018-04-04T14:07:47+00:00 Read More
A universal substrate sample fixture for efficient multi-instrument inspection of large, flexible substrates, with absolute position registration support euspen2018-04-04T14:07:47+00:00 Read More
Investigating mechanical characteristics of styli for micro-CMMs euspen2018-04-04T14:07:47+00:00 Read More
Design of a laser scanner system for sub-mm 3D shape measurement using commercial off-the-shelf components euspen2018-04-04T14:07:47+00:00 Read More
Tilt Sensitivity of an Eddy-Current Position Sensor for High-Precision Applications euspen2018-04-04T14:07:48+00:00 Read More
Precision measurement technique for rough surface object using self-beat signals of optical frequency comb euspen2017-08-21T00:00:00+00:00 Read More
