A reference artefact to evaluate the metrological performance in the quantification of raising surface defects on manufactured surfaces
Defect,Metrology,Performance,Surface
An approach to improve accuracy and productivity of industrial CMM measurements at high scanning speed
Coordinate measuring machine (CMM),Scanning,Uncertainty
Measurement of aspheric mirror by non-contact three dimensional nano-profiler using normal vector tracing method
Measurement,Metrology,Surface,Uncertainty
Multiscale calibration of a low-coherence interferometer for embedded metrology
Calibration,In-process measurement,Interferometry,Metrology
Traceable 5D-nanofabrication with nano positioning and nano measuring machines
Metrology,Nano manufacturing,Stamping,Ultra-precision
Three-dimensional nano-profile of convex cylindrical mirror measured by normal vector tracing method
Measurement,Optical,Profile,Surface
Performance evaluation of LiDAR-based position measurement system
Evaluation,Laser,Metrology,Performance