Assessment of microscopy moving stage performance down to the 10 nm range using encoded patterns with automated reading
Calibration,Coordinate measuring machine (CMM),Microscope,Positioning
Separable Water Supply Machine for Hydraulic-Driven Micro Device
Accuracy,Actuator,Hydrostatic,Sensor
Biconic Zernike Surface Using a Cartesian Coordinate Machine and an Analytical Solution of the Tool Path
Manufacturing (CAM),Computer numerical control (CNC),Grinding,Polishing
Development of an ultra precise XY motion stage for large flat panel manufacturing equipment
Mechanism,Motion,Positioning,Precision
Decentralized controller design in flexure-linked gantry by H2 guaranteed cost optimization approach
Mechatronic,Motion,Optimisation,Precision
Development of Hydraulic-Driven Devices Using Additive Manufacturing
Accuracy,Actuator,Hydrostatic,Sensor
Development of High-Precision Parallel Kinematics for Industrial Automation and Silicon Photonics
Hexapod,Parallel,Photonics,Robot
High-Accuracy Z Actuator Relying on a 3-dof Flexural Elements-Based Concept
Accuracy,Actuator,Control,Mechatronic