Assessment of microscopy moving stage performance down to the 10 nm range using encoded patterns with automated reading
Calibration,Coordinate measuring machine (CMM),Microscope,Positioning
Calibration,Coordinate measuring machine (CMM),Microscope,Positioning
Accuracy,Actuator,Hydrostatic,Sensor
Manufacturing (CAM),Computer numerical control (CNC),Grinding,Polishing
Mechanism,Motion,Positioning,Precision
Accuracy,Actuator,Hydrostatic,Sensor
Mechatronic,Motion,Optimisation,Precision
Hexapod,Parallel,Photonics,Robot
Accuracy,Actuator,Control,Mechatronic