Assessment of microscopy moving stage performance down to the 10 nm range using encoded patterns with automated reading
Calibration,Coordinate measuring machine (CMM),Microscope,Positioning
Calibration,Coordinate measuring machine (CMM),Microscope,Positioning
Accuracy,Actuator,Hydrostatic,Sensor
Manufacturing (CAM),Computer numerical control (CNC),Grinding,Polishing
Mechanism,Motion,Positioning,Precision
Mechatronic,Motion,Optimisation,Precision
Accuracy,Actuator,Hydrostatic,Sensor
Hexapod,Parallel,Photonics,Robot
Accuracy,Actuator,Control,Mechatronic