High Precision Mechatronics

|High Precision Mechatronics

Development of Non-contact 3D Measurement System for Parts of Accelerator Cavities

Sub-nanometer Resolution Linear Encoder with Polarization Insensitive Laser Doppler Displacement Meter Technology and Multi-reflection Optics

Self-tuning of Hybrid Position and Velocity Feedback of 6-DOF Vibration Isolation System

Hexapod Systems for UHV Applications with Active Vibration Damping

An Inchworm-type Microactuator Using Levitation Mechanisms

Design and Optimization of a Novel Compact and Long-range 3-DOF Flexure Stage

Development of Micro-Object Position Detection System for the Automation of Robot Hand

New Concept for Simplified Recalibration of Hexapod Positioning Units in Industrial Environment

New Approach to Overcome the Limitations in Small Torque Realization

Position Control of a MEMS Stage with Integrated Sensor

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