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High Precision Mechatronics
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High Precision Mechatronics
Superstructures control with active tie rods
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euspen
2018-04-04T13:59:22+00:00
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Highly accurate passive actuation system
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euspen
2018-04-04T13:59:34+00:00
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FEM model based POD reduction to obtain optimal sensor locations for thermo-elastic error compensation
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euspen
2018-04-04T13:59:34+00:00
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Design and fabrication of a novel centimeter scale three dimensional silicon tip, tilt and piston mirror mechanism
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euspen
2018-04-04T13:59:34+00:00
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2-DoF magnetic actuator for a 6-DoF stage with long-stroke gravity compensation
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euspen
2018-04-04T13:59:37+00:00
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Measurement set-ups and cycles for thermal characterization of axes of rotation of 5-axis machine tools
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euspen
2018-04-04T14:04:42+00:00
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A 2-DOF Linear-Rotary Electromagnetic Actuator for High Precision Positioning Tasks
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euspen
2018-04-04T14:06:07+00:00
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Sub-nanometer Resolution Linear Encoder with Polarization Insensitive Laser Doppler Displacement Meter Technology and Multi-reflection Optics
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euspen
2018-04-04T14:05:55+00:00
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Experimental validation of a piezoelectrically driven photomask curvature manipulator
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euspen
2018-04-04T14:04:32+00:00
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Active Guides for Precision Micro-systems
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euspen
2018-04-04T14:05:58+00:00
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