High Precision Mechatronics

|High Precision Mechatronics

Superstructures control with active tie rods

Highly accurate passive actuation system

FEM model based POD reduction to obtain optimal sensor locations for thermo-elastic error compensation

Design and fabrication of a novel centimeter scale three dimensional silicon tip, tilt and piston mirror mechanism

2-DoF magnetic actuator for a 6-DoF stage with long-stroke gravity compensation

Development of a polishing pressure control system for ultra-precision finishing

Design and operating principles of a magnetically suspended ceiling actuator with fail-safe operation

A Six-degree-of-freedom Micro Parallel Kinematic Stage for Multi-axis Positioning

Experimental validation of design parameters of a non-contact thermally actuated deformable mirror

Automated microforming of MST-parts for small electric motors

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