FEM model based POD reduction to obtain optimal sensor locations for thermo-elastic error compensation euspen2018-04-04T13:59:34+00:00 Read More
Design and fabrication of a novel centimeter scale three dimensional silicon tip, tilt and piston mirror mechanism euspen2018-04-04T13:59:34+00:00 Read More
2-DoF magnetic actuator for a 6-DoF stage with long-stroke gravity compensation euspen2018-04-04T13:59:37+00:00 Read More
Development of a polishing pressure control system for ultra-precision finishing euspen2018-04-04T14:04:31+00:00 Read More
Design and operating principles of a magnetically suspended ceiling actuator with fail-safe operation euspen2018-04-04T14:04:31+00:00 Read More
A Six-degree-of-freedom Micro Parallel Kinematic Stage for Multi-axis Positioning euspen2018-04-04T14:04:32+00:00 Read More
Experimental validation of design parameters of a non-contact thermally actuated deformable mirror euspen2018-04-04T14:04:32+00:00 Read More
Automated microforming of MST-parts for small electric motors euspen2018-04-04T14:04:32+00:00 Read More
