Cost-Effective High-Precision Magnetically Levitated Positioning Stage Technology
Control,Interferometry,Mechatronic,Servosystem
The Fastjack A robust, UHV compatible and high performance linear actuator
Actuator,Interferometry,Piezo-electric,Vacuum
Development of high-speed polygon-galvanometer scanning system supporting Micro-LED massive transfer
Control,Mechatronic,Scanning
The Fastjack A robust, UHV compatible and high performance linear actuator
Actuator,Interferometry,Piezo-electric,Vacuum
Acceleration feedback control in fast tool servo freeform machining
Computer numerical control (CNC),Cutting,Dynamic,Stiffness
Cost-Effective High-Precision Magnetically Levitated Positioning Stage Technology
Control,Interferometry,Mechatronic,Servosystem
Modeling and feedforward control for high performance galvanometer scanners
Control,Dynamic,Mechatronic,Modelling
A galvanometer based laser dynamic focusing system
Dynamic,Optical,Precision,Scanning
Flexure positioning stage based on delta technology for high precision and dynamic industrial machining applications
Computer numerical control (CNC),Control,Dynamic,Precision