AFM-ECM: Electrochemical micro/nano machining on an AFM platform
Electro chemical machining (ECM);Micromachining
Electro chemical machining (ECM);Micromachining
Accuracy;Burr;Drilling;Micromachining
Actuator;Control;Magnetic bearing;Micromachining
Diamond;Finishing;Laser;Polishing
Control;Dynamic;Estimating;Positioning
Diamond;Turning;Ultra-precision
Compensation;Machining;Monitoring;Positioning
Control;Micromachining;Simulation;Turbine blade