Study on variations in ductile-to-brittle transition points at nano-scale mechanical machining by thin film
Machining;Mechanical;Nano manufacturing;Single crystal
Machining;Mechanical;Nano manufacturing;Single crystal
Actuator;Mechatronic;Nonlinear;Piezo-electric
Grinding;Precision;Roughness;Surface
Actuator;Mechatronic;Piezo-electric;Positioning
Control;Cooling;Spindle;Temperature
Finite element method (FEM);Grinding;Material;Structure
Defect;Image;Inspection;Thermal conductivity
Fluid;Grinding;Image;In-process measurement
Finite element method (FEM);Gear;Polishing;Surface