Compact fiber-coupled interferometric displacement sensors with strong suppression of parasitic reflections
Distance;Interferometry;Measuring instrument;Precision
Distance;Interferometry;Measuring instrument;Precision
In-process measurement;Metrology;Optical
Accuracy;Electrical discharge machining (EDM);Experimentation;Mechanism
Flexibility;Force;Mechanism;Nonlinear
Diamond;Temperature;Turning;Ultra-precision
Diagnostics;Failure;Machining;Spindle
Coating;Edge;Feedback;Neural network
Accuracy;End milling;Geometry;Surface
Injection;Laser micro machining;Resistance;Surface