Novel hybrid interference and atomic force microscopy for in-situ reference areal surface metrology
Atomic force microscopy (AFM);Interferometry;Metrology;Topography
Atomic force microscopy (AFM);Interferometry;Metrology;Topography
Biomedical;Design;Injection;Mechanism
Accuracy;Dynamic;Piezo-electric;Positioning
Dynamic;Error;Machining;Robot
Micromachining;Monitoring;Tool;Wear
Artificial intelligence;Interferometry;Neural network;Optical
Accuracy;Measuring instrument;Sensor;Vibration
Manufacturing;Metal;Powder;Selective laser melting (SLM)