On the development of five-axes nanopositioning machines for measurement and fabrication purposes based on Cartesian systems
Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Ultra-precision
Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Ultra-precision
Actuator,3D printing,Manipulator,Manufacturing
Calibration,Metrology,Microstructure
Positioning,Thermal error,Uncertainty