Influence of linear stage technologies for a high speed optical sensor
Metrology,Motion
Interferometry,Measurement,Metrology,Optical
Evaluation,Laser,Metrology,Performance
Computer numerical control (CNC),Estimating,Modelling,Simulation
Carbide,Grinding,Super abrasive,Wire EDM
Calibration,In-process measurement,Turning,Ultra-precision
Accuracy,Alignment,Design,Precision
Assembly,Measuring instrument,Mechanism
Laser beam machining (LBM),Rolling,Surface,Tribology
Chatter,Damping,Machining,Stiffness