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Process Modelling and Simulation of Vibratory Finishing of Fixtured Components

Compact Nanometer Resolution Fiber-optic Encoder with Embedded Reference Mark

Dynamical Investigation of a Wrap-around Gas Bearing Design in a Vacuum Environment

Sub-Nanometer Positioning with a High Resolution Laser Interferometer

Design of a Magnetically Levitated Six Degrees-of-freedom Planar Motor using T-shape Halbach Magnet Array

Development of a High Precision Clamping System for the Compensation of Angular Errors in Workpiece Alignments

Lightweight 450 mm Wafer Stages Enabled by Over-actuation

Mechatronic System Design of an Optical Element Curvature Actuation System

Electrode Feeding Device for Micro-hole Electrical Discharge Machining by Using AZARASHI Mechanism

Measurement of the Percentage Contact Area of High Precision Planar Ball Guideways

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