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Micromilling for the Fabrication of Complex Optical Microsystems

Fabrication of Micro Fluidic Mould by Micro Milling and Laser de-burring

A Newly Developed Ulptaprecision Machine Tool “ANGEL”

The Mystery of Active Vibration Isolation

Three-dimensional nano-positioning system for compact CMM

MEMS Surface Characterization Based on White Light Phase Shifting Interferometry

Effect of Tool Shape on Precision Hole-cutting of Laminated Composite Materials

5-axis Control Ultraprcision Micromilling by Means of a Developed CAPP/CAM System

Development of a High Precision Clamping System for the Compensation of Angular Errors in Workpiece Alignments

Fundamental Consideration on Design of Restrictor for Hydrostatic Bearing

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