Traceable 5D-nanofabrication with nano positioning and nano measuring machines

Uploaded: 10th June 2021

Author: Ingo Ortlepp, Florian Fern, Ralf Schienbein, Shraddha Supreeti, Eberhard Manske, Roland Füßl, René Theska, Stefan Sinzinger

Metrology,Nano manufacturing,Stamping,Ultra-precision

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