Uploaded: 4th June 2014
AuthorD.HirookaAuthor, H. OguraAuthor, N. FurushiroAuthor, N.NatsumoriAuthor, T.Yamaguchi Download FileSuperfinishing characteristics of single crystal silicon with mechanochemical superabrasive stone containing BaSO4 abrasive
Home|Superfinishing characteristics of single crystal silicon with mechanochemical superabrasive stone containing BaSO4 abrasive