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Polishing characteristics of CVD-SiC in plasma-assisted polishing

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Hui Deng
Katsuyoshi Endo
Kazuya Yamamura
Polishing characteristics of CVD-SiC in plasma-assisted polishing

Uploaded: 6th January 2015

Author: Hui Deng, Katsuyoshi Endo, Kazuya Yamamura

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