Planarization of SiC and oxide surfaces by using Catalyst-Referred Etching with water

Uploaded: 30th May 2017

AuthorAi IsohahsiAuthor, Daisetsu TohAuthor, Kazuto YamauchiAuthor, Kouji InagakiAuthor, PHO VAN BUIAuthor, Satoshi MatsuyamaAuthor, Yasuhisa Sano Download File