Nanometrology and nanofabrication using a tip-based system combined with a planar nanopositioning machine (NFM-100)

Uploaded: 29th November 2023

Author: Jaqueline Stauffenberg, Johannes Belkner, Jasmin Ruprecht, Ingo Ortlepp, Eberhard Manske

Atomic force microscopy (AFM),Nano manufacturing,Positioning

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