Measurement module based on a common-path Fabry-Perot interferometer for determining three-degree-of-freedom motion parameters

Uploaded: 5th June 2018

Author: Hung-Ta Shih,Pi-Cheng Tung,Lih-Horng Shyu,Chung-Ping Chang,Eberhard Manske,Bean-Yin Lee,Jui-Cheng Lin,Yung-Cheng Wang

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