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Fast Figure Correction of 400mm Diameter ULE Mirror by Reactive Atom Plasma

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M Castelli
P Morantz
Paul Shore
R. Jourdain
Fast Figure Correction of 400mm Diameter ULE Mirror by Reactive Atom Plasma

Uploaded: 4th June 2012

Author: M Castelli, P Morantz, Paul Shore, R. Jourdain

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